-
MV-CAUltra-fine particle vision inspection & target removal
● Suitable for wafers & chips of various sizes
● The surface material with particles is not restricted
● Micron-level detection and position accuracy
● Comprehensive efficiency/low-maintenance design ensures users truly reduce operational costs and improve production yield.
● Rich data statistical analysis capabilities and real-time communication with MES systems enable lean production
Stable thermodynamic conditions in Cz crystal pullers is necessary to guarantee highest quality of Si-wafers for monocrystalline solar cells or electronic semiconductor device. And this conditions are strongly influenced by the gap distance of the heat shield and the hot Silicon melt,which will change during the grow process of the ingot and has to be readjusted. Therefore it is essential to measure and control this distance accurately and reliable.
● High accuracy (<0.5mm)
● Measurement range: 3-30mm gap
● Fast measurement (up to 5 Hertz)
● Data logging
● Trend data
● Line interface
● New patent applied optical design